Browse Prior Art Database

Scratch-Free Vacuum Pencil Tips

IP.com Disclosure Number: IPCOM000105256D
Original Publication Date: 1993-Jul-01
Included in the Prior Art Database: 2005-Mar-19
Document File: 2 page(s) / 36K

Publishing Venue

IBM

Related People

Kise, H: AUTHOR [+2]

Abstract

Disclosed is the Vacuum Pencil Tips to prevent scratching damage to the surface of wafers adjacent to the wafer to be picked up. The Vacuum Pencil Tips disclosed has an attached part to the backside of the vacuum pencil tips.

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This is the abbreviated version, containing approximately 100% of the total text.

Scratch-Free Vacuum Pencil Tips

      Disclosed is the Vacuum Pencil Tips to prevent scratching
damage to the surface of wafers adjacent to the wafer to be picked
up.  The Vacuum Pencil Tips disclosed has an attached part to the
backside of the vacuum pencil tips.

      Vacuum pencil is a small gadget to pick-up a wafer from a wafer
cassette in which wafers are stored.  The wafer cassette usually has
25 slots to stores a wafer in each slot.  The vacuum pencil has its
tip to stick to the backside of a wafer with vacuum to hold the
wafer.  While an operator inserts the vacuum pencil between wafers
stored in a wafer cassette to stick to the backside of the wafer, the
vacuum pencil or the edge of the handling wafer may touch and scratch
the surface of wafers which are stored adjacent to the one to be
picked up.

      The disclosed Vacuum Pencil Tip has a small part attached to
the backside of the vacuum pencil tip as shown in the figure.  The
small part has a height larger than the space between the wafer
cassette slots , a round shape , a bar shape or a block shape and is
made of contamination-free plastic material.  This small part acts
like a stopper when the operator inserts the vacuum pencil between
the wafers stored in the slots and restrains the operator to insert
the vacuum pencil so that the vacuum pencil dose not touch and
scratch the surface of wafers adjacent to the wafer to be picked up.