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Using a Mirror Image Test Structure to Measure the Throat Height Insulation Movement as a Result of Photo-Imaging and Hard Baking

IP.com Disclosure Number: IPCOM000105805D
Original Publication Date: 1993-Sep-01
Included in the Prior Art Database: 2005-Mar-20
Document File: 2 page(s) / 88K

Publishing Venue

IBM

Related People

Buttke, J: AUTHOR [+4]

Abstract

Disclosed is a mirror image test structure which provides a means for precise measurement of the movement of throat height apex positions as a result of processes such as, photo-imaging, shrinkage due to hard bake cross-polymerization and sputter etching. The test structure generally applies to the use of photoresit as an insulating throat height material in the construction of thin film magnetic recording heads.

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Using a Mirror Image Test Structure to Measure the Throat Height Insulation Movement as a Result of Photo-Imaging and Hard Baking

      Disclosed is a mirror image test structure which provides a
means for precise measurement of the movement of throat height apex
positions as a result of processes such as, photo-imaging, shrinkage
due to hard bake cross-polymerization and sputter etching.  The test
structure generally applies to the use of photoresit as an insulating
throat height material in the construction of thin film magnetic
recording heads.

      One performance requirement of thin film magnetic recording
head transducers is the positional control of inductive throat height
apexes.  For single-element inductive head transducers, it is
important to maintain the transverse straightness of rows of throat
height apexes for subsequent throat height lapping on a row basis.
For magnetoresistive (MR) recording heads, it is important to
maintain both the transverse straightness of the induct write
transducer and the precise relationship between the MR stripe height
and inductive throat height apex.

      There are three basic component errors which must be controlled
to maintain the overall movement control of inductive apexes.  Image
Centering and alignment are two of the three components which could
compromise positional control.  But typically these errors can be
controlled to acceptable levels using state-of-the-art mask and
printing equipment.  The third component is the image size of the
throat height insulation layer.  In order to control the image size
of the throat height insulation layer during processing, it is
necessary to provide a means for measuring image size.  Where it is
relatively a simple task to measure image size of lines in the 10 um
range, it is currently difficult if not impossible to measure image
size of a large body of throat height insulation which can be in
excess of 300 um in width.

      Hence, to provide an accurate means for measuring image size of
large bodies of throat height insulation, a mirror image test
structure is presented in the figure.  In this test structure, two
bodies to resist insulation 1 an...