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Large Area Radiative Rotational Oven Heater

IP.com Disclosure Number: IPCOM000106188D
Original Publication Date: 1993-Oct-01
Included in the Prior Art Database: 2005-Mar-20
Document File: 2 page(s) / 65K

Publishing Venue

IBM

Related People

Crockett, JG: AUTHOR [+3]

Abstract

Disclosed is a 2"&phi. rotational radiative oven heater design capable of operating in oxygen environments from vacuum to atmospheric pressure at elevated temperatures above 800ºC. This heater scheme is implemented for the deposition of superconducting cuprate films {both Yttrium-Barium-Copper-Oxide (YBCO) and Gadolinium-Barium-Copper-Oxide (GdBCO)}. The heater lends itself to large area, high-quality, good thickness uniformity over 2"&phi. substrates with minimal boulder surface topology films. Thin film epitaxial insulator layers of Strontium Titanate (STO) and Cerium Dioxide (CEO) compatible with the superconducting cuprate films have been deposited.

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Large Area Radiative Rotational Oven Heater

      Disclosed is a 2"&phi.  rotational radiative oven heater design
capable of operating in oxygen environments from vacuum to
atmospheric pressure at elevated temperatures above 800ºC.  This
heater scheme is implemented for the deposition of superconducting
cuprate films {both Yttrium-Barium-Copper-Oxide (YBCO) and
Gadolinium-Barium-Copper-Oxide (GdBCO)}.  The heater lends itself to
large area, high-quality, good thickness uniformity over 2"&phi.
substrates with minimal boulder surface topology films.  Thin film
epitaxial insulator layers of Strontium Titanate (STO) and Cerium
Dioxide (CEO) compatible with the superconducting cuprate films have
been deposited.

      One of the novel aspects of this heater design is the
elimination of a thermal conductive adhesive.  Scale up to larger
areas lends itself to a radiative-type of device.  This elegant
design has a profound affect upon increasing the uniform deposition
coverage, the low heater power requirement as a consequence of the
coiled heater wire element, the lack of cooling water needed, and the
shielding with an aperture deposition hole which is stationary to the
moving wafer.  This substrate is rotated past the aperture hole with
sufficient rotation so the temperature drop at the substrate surface
will not be below the critical epitaxial superconducting phase
temperature.

      Stainless steel grade material houses the shields, gears and
support holders for the heater.  Haynes alloy...