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Micromechanical Hard Disk with Diamond Like Carbon Lubrication and Two Lithography Steps

IP.com Disclosure Number: IPCOM000106376D
Original Publication Date: 1993-Nov-01
Included in the Prior Art Database: 2005-Mar-21
Document File: 2 page(s) / 66K

Publishing Venue

IBM

Related People

Grill, A: AUTHOR [+3]

Abstract

Disclosed is a micromechanical motor with diamond like carbon (DLC) wear surfaces fabricated with few alignment steps.

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Micromechanical Hard Disk with Diamond Like Carbon Lubrication and Two Lithography Steps

      Disclosed is a micromechanical motor with diamond like carbon
(DLC) wear surfaces fabricated with few alignment steps.

      The Figure sketches the layers placed on the silicon surface 1.
The first layer 2 is a DLC surface which will be a wear/lubrication
layer, the second layer 3 is a sacrificial layer, for example
SiO2.  The third layer 4 is the material such as polysilicon,
polygermanium, or other support layer for the rotor of a motor or a
magnetic disk for a magnetic disk recording.

      The surface is patterned by normal lithographic and etching
means where the region of the hub 5 and the periphery of the motor or
disk 6 is etched down to the underlying sacrificial layer 3 Then, a
thin layer of DLC 7 is grown conformably over the surface, and a
sacrificial layer 8 is grown over the DLC layer 7 (Figs. A and B).
The hub region 5 is isolated by normal lithographic means and is then
etched out down to the crystal silicon substrate 1 (Fig. C).

      Now, silicon or germanium is grown as the hub 9 of the motor or
disk by using epitaxial lateral overgrowth techniques.  The hub has
its "cap" 10 grown automatically so that, when the sacrificial layers
3 and 8 are etched away to free the rotor, the rotor is constrained
from moving axially (Fig. C).

All bearing surfaces are coated with DLC.