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Browse Prior Art Database

Particulate Inspection and Removal System for Liquid Crystal Display Cell Fabrication Process

IP.com Disclosure Number: IPCOM000106622D
Original Publication Date: 1993-Dec-01
Included in the Prior Art Database: 2005-Mar-21
Document File: 2 page(s) / 69K

Publishing Venue

IBM

Related People

John, RA: AUTHOR [+3]

Abstract

The high-point and white-point defects are two of the most common cell fabrication defects. They are caused by the impurity particle which lies on the substrate surface prior to the cell being assembled. Even working in a high class clean room environment, the impurity particles still can not be totally avoided if the rubbing of the polyimide (PI) is involved in the process or if the cell fabrication process requires operator(s). However, the PI rubbing and the operator involvement in the cell fabrication process are usually the case for the active matrix LCD manufacture. These high-point or white-point defects will greatly degrade the optical performance and appearance of the panel. Sometimes, even a single high-point defect or a few white-point defects would make a panel unacceptable.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 52% of the total text.

Particulate Inspection and Removal System for Liquid Crystal Display Cell Fabrication Process

      The high-point and white-point defects are two of the most
common cell fabrication defects.  They are caused by the impurity
particle which lies on the substrate surface prior to the cell being
assembled.  Even working in a high class clean room environment, the
impurity particles still can not be totally avoided if the rubbing of
the polyimide (PI) is involved in the process or if the cell
fabrication process requires operator(s).  However, the PI rubbing
and the operator involvement in the cell fabrication process are
usually the case for the active matrix LCD manufacture.  These
high-point or white-point defects will greatly degrade the optical
performance and appearance of the panel.  Sometimes, even a single
high-point defect or a few white-point defects would make a panel
unacceptable.  The elimination of the high-point or white-point
defects are required in order to improve the manufacture yield.  A
traditional pressurized nitrogen gun blowing method can not be used
for both the top and bottom substrates since it will blow off the
spacers lying on at least one of the substrate surfaces for the cell
gap control purpose.  Sometimes, even through a substrate has been
blown with a pressurized nitrogen gun, some impurity particles still
cannot be removed.  In this disclosure, a system which can inspect
the impurity particles and remove them from the substrate surface
without damaging the structure of the substrate surface is disclosed.

      The schematic diagram of the impurity particle inspection and
removal system is given in...