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Pyrolytic Boron Nitride Heater with Integrated Thin Film Termocouple

IP.com Disclosure Number: IPCOM000106633D
Original Publication Date: 1993-Dec-01
Included in the Prior Art Database: 2005-Mar-21
Document File: 2 page(s) / 31K

Publishing Venue

IBM

Related People

Sandstrom, RL: AUTHOR

Abstract

Disclosed is a novel integrated thin film thermocouple for in-situ temperature measurements. A Pyrolytic Boron Nitride (PBN) electric heat device for elevated temperatures can be integrated with a thin film layer of Pt/Pt-Rh thermocouple material either by sputtered or electrochemical deposited material. Thickness of the material can be from a few microns to a few mils. Photolithography defines the thin film lines and contact closure point. The thermal compatibility for these materials is good. This coating comprises the thin film thermocouple device that will be covered with a protective layer.

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Pyrolytic Boron Nitride Heater with Integrated Thin Film Termocouple

      Disclosed is a novel integrated thin film thermocouple for
in-situ temperature measurements.  A Pyrolytic Boron Nitride (PBN)
electric heat device for elevated temperatures can be integrated with
a thin film layer of Pt/Pt-Rh thermocouple material either by
sputtered or electrochemical deposited material.  Thickness of the
material can be from a few microns to a few mils.  Photolithography
defines the thin film lines and contact closure point.  The thermal
compatibility for these materials is good.  This coating comprises
the thin film thermocouple device that will be covered with a
protective layer.

      A final protective top coat of PBN over this Pt/Pt-Rh
thermocouple material seals the device and protects it from the
surrounding environment.  Lead areas where external connections can
be made must be opened up to make a connection point for the Pt/Pt-Rh
wires so they can be brazed or spot welded to the external wiring
scheme and the outside world.  There is little or no outgassing when
pumped down in a vacuum system and ultra-high vacuum compatible.

      This thermocouple material can handle over 1000ºC in
corrosive environments, routinely.  Because of its compatibility with
PBN and its coatings, the thermal expansion coefficients match,
therefore, no cracking or degradation of this thermocouple material
results.