Browse Prior Art Database

Disk Loading Tool for Sputtering Operation

IP.com Disclosure Number: IPCOM000106715D
Original Publication Date: 1993-Dec-01
Included in the Prior Art Database: 2005-Mar-21
Document File: 2 page(s) / 80K

Publishing Venue

IBM

Related People

Gorman, RE: AUTHOR [+12]

Abstract

Disclosed is a tool for automatically loading silicon disks onto a pallet before applying a thin film in a sputtering operation.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 52% of the total text.

Disk Loading Tool for Sputtering Operation

      Disclosed is a tool for automatically loading silicon disks
onto a pallet before applying a thin film in a sputtering operation.

      Fig. 1 is an isometric view of the disk loading tool, Fig. 2 is
a right end elevational view, showing particularly the area where
cassettes full of disks are loaded into the tool, and Fig. 3 is a
front view of a robot and controller portion of the tool.

      Referring to Fig. 1, operation of the tool is started when the
operator depresses a POWER ON button on control panel 10, turning on
power for control cabinet 12, controller 14, and arm servo power
supply 16.  The operator then opens doors 18 to place a cassette 20,
including compartments in which disks 22 are stacked in a
spaced-apart relation- ship, on an input buffer conveyer 24.  After
closing doors 18, the operator presses a START CYCLE button on
control panel 10, so that input buffer conveyer 24 drives cassette
20, by means of a number of rotating rollers 25, in the direction of
arrow 26 onto a lifter alignment belt (not shown).

      Referring to Fig. 2, the lifter alignment belt (not shown)
positions cassette 20, relative to the direction of arrow 26, so that
the first disk 22 is aligned with a lifter 27, which then lifts this
disk 22 into a raised position 28.  Cassette 20 is open at the top
and bottom, so that lifter 27 can move upward from below to provide
this function.  As the disk 22 is thus lifted to clear cassette 20,
both sides of disk 22 are cleaned by a contamination removal device
29.

      Referring to ...