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Browse Prior Art Database

Gas Pressure Lamination Fixture

IP.com Disclosure Number: IPCOM000107243D
Original Publication Date: 1992-Jan-01
Included in the Prior Art Database: 2005-Mar-21
Document File: 1 page(s) / 64K

Publishing Venue

IBM

Related People

Caulfield, T: AUTHOR [+3]

Abstract

Disclosed is a technique for high temperature and high pressure lamination of thin metal or metal/polymer decals or arrays to silicon or ceramic substrates. The disclosed fixture allows for uniform pressure and temperature distribution over large areas.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 65% of the total text.

Gas Pressure Lamination Fixture

      Disclosed is a technique for high temperature and high pressure
lamination of thin metal or metal/polymer decals or arrays to silicon
or ceramic substrates.  The disclosed fixture allows for uniform
pressure and temperature distribution over large areas.

      Lamination of two materials, such as a metal/polymer decal to a
substrate, demands precise dimensional control of platen flatness and
parallelism during lamination.  This is further complicated by the
fact the ceramic substrates may not have parallel surfaces and that
lamination temperatures of 400~C may be required, which implies TCE
differentials that may introduce planarity differences.  The use of
compliant materials, such as glass mat, can be used in some cases to
achieve uniform pressure distribution, but these materials can only
be used if small non-uniformities exist. If irregularities occur
which cannot be compensated for, fracture of substrates, such as
silicon or ceramic, can occur.  In order to achieve uniform pressure
distributions on non-ideal surfaces, a semi-isostatic fixture, shown
schematically in Figure 1, was built and tested.  This fixture
consists of two main cells: the high pressure, gas cell, and the low
pressure cell.  The fixture allows a substrate to be placed in the
low pressure cell, and a thin film decal is then aligned and held in
place via vacuum.  A 3-5 mil diaphragm fabricated from (Cu, Cu-Be, Mo
or other thin metal or polymer) is...