Browse Prior Art Database

High Density Probe Assembly

IP.com Disclosure Number: IPCOM000107248D
Original Publication Date: 1992-Jan-01
Included in the Prior Art Database: 2005-Mar-21
Document File: 2 page(s) / 79K

Publishing Venue

IBM

Related People

Chiang, S: AUTHOR [+2]

Abstract

Disclosed is a high density probe assembly which consists of probe wires embedded in an elastic matrix. This probe assembly can be disposable or permanently mounted to the test tool for chip, wafer, substrate, and board electrical testing or burn-in.

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This is the abbreviated version, containing approximately 58% of the total text.

High Density Probe Assembly

      Disclosed is a high density probe assembly which consists of
probe wires embedded in an elastic matrix.  This probe assembly can
be disposable or permanently mounted to the test tool for chip,
wafer, substrate, and board electrical testing or burn-in.

      Fig. 1 is a side view of a test configuration using the probe
assembly.  The probe assembly consists of metal probes embedded in an
elastic matrix.  The probe can be normal probing material, such as
beryllium copper, palladium alloy, rhodium or rhodium alloy, osmium
or osmium alloy, tungsten, tungsten carbide, etc.  The elastic matrix
may be made of polymer, such as elastomer, polyimide, or other
insulator. The top surface of the probe assembly has a contact
metallurgy slightly higher than the surface so that the probe
assembly can be held to the spacetransformer by vacuum or other
mechanical means.  All the probes should stick out from the bottom
surface of the probe assembly to provide reliable contacts to the
sample under test.  The compliance of the probe assembly is provided
by the compression of the matrix by the probes and the bending of the
probes themselves.  The probe force can be controlled by the probe
and matrix materials, angle and the dimension of the probes, and the
thickness of the probe assembly.  If the matrix is made of a soft
elastic material, e.g., elastomer, the amount of the metal probe
sticking out of the matrix can be short in meeting certain pr...