Browse Prior Art Database

Environmental Cell for TEM and Ion Scattering Studies

IP.com Disclosure Number: IPCOM000107374D
Original Publication Date: 1992-Feb-01
Included in the Prior Art Database: 2005-Mar-21
Document File: 2 page(s) / 49K

Publishing Venue

IBM

Related People

Dana, SS: AUTHOR [+3]

Abstract

Disclosed is an invention which makes possible the isolation of a distinct environment in a small volume and allows the study of this enclosed environment by Transmission Electron Microscopy (TEM) or by Ion Scattering. These techniques require vacuum to operate.

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Environmental Cell for TEM and Ion Scattering Studies

       Disclosed is an invention which makes possible the
isolation of a distinct environment in a small volume and allows the
study of this enclosed environment by Transmission Electron
Microscopy (TEM) or by Ion Scattering.  These techniques require
vacuum to operate.

      The environmental cell consists of two windows typically used
for TEM glued together in a way that enclose a small volume (see Fig.
1).  The windows are traditionally etched on a silicon wafer coated
with a silicon nitride or boron nitride thin film.  The glue is any
low vapor pressure glue, like liquid polystyrene q-dope.  A polymer
film that can be etched may be used as a spacer to define the optimal
separation between windows and the enclosed volume.

      Disclosed here is the use of the cells described above or those
made with other materials to be used in experiments in which a given
material is placed in any environment different from vacuum and
insulated from it to be studied by TEM or Ion Scattering or by any
other suitable technique that require vacuum to be operative.

      Fig. 2 shows an optical micrograph of one of the cells
described above containing water, after two days in vacuum. The wafer
meniscus and droplets show that the cell withstands the pressure
difference.