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Process Tool for High Purity/ Reliability 3-Aminopropyltrihydroxysilane

IP.com Disclosure Number: IPCOM000107375D
Original Publication Date: 1992-Feb-01
Included in the Prior Art Database: 2005-Mar-21
Document File: 2 page(s) / 69K

Publishing Venue

IBM

Related People

Buchwalter, PP: AUTHOR [+3]

Abstract

Disclosed is a process tool designed to eliminate the unpredictable behavior of the adhesion promoter 3-aminopropyltrihydroxysilane. (Image Omitted)

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This is the abbreviated version, containing approximately 53% of the total text.

Process Tool for High Purity/ Reliability 3-Aminopropyltrihydroxysilane

       Disclosed is a process tool designed to eliminate the
unpredictable behavior of the adhesion promoter
3-aminopropyltrihydroxysilane.

                            (Image Omitted)

      3-aminopropyltrihydroxysilane (3-APTHS) has a long history of
use as an adhesion promoter.  This material is prepared by mixing a
molecular precursor with water. Despite this long history of use,
experience has shown that the quality of overlayers produced in a
casual fashion, i.e., without strict attention to the purity of
starting materials and the timely use of the solution once prepared,
can result in adhesion behavior which is somewhat erratic at best,
and disastrous at worst.  This is thought to be due to the fact that
impurities present in the starting solution result in a molecular
overlayer which is not continuous.  This problem is exacerbated at
small feature sizes, where discontinuities may approach the size of
working features.

      Recent experiments have shown that use of an aqueous solution
of 3-APTHS prepared from triply distilled water and triply distilled
precursor, when used in a timely fashion, will produce overlayers
which are dense and essentially free of contaminants which would
interfere with the action of the molecule to promote adhesion.  We
propose a tool which, when operated with the above mentioned high
purity starting materials, will reliabl...