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Optical Signal Distribution by Filled Trench Channel Polymer Waveguide

IP.com Disclosure Number: IPCOM000107412D
Original Publication Date: 1992-Feb-01
Included in the Prior Art Database: 2005-Mar-21
Document File: 2 page(s) / 51K

Publishing Venue

IBM

Related People

Gallo, AR: AUTHOR [+2]

Abstract

Disclosed is a process for defining a channel distribution system for optical signal distribution. The channel is filled with a stable polymer material forming a strip-loaded waveguide capable of being used in an optical clock or data bus application.

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Optical Signal Distribution by Filled Trench Channel Polymer Waveguide

       Disclosed is a process for defining a channel
distribution system for optical signal distribution.  The channel is
filled with a stable polymer material forming a strip-loaded
waveguide capable of being used in an optical clock or data bus
application.

      The waveguide pattern is formed by:
      1)   Producing a channel in a polymer layer.
           The channel may be produced by:
           a)   laser ablation (by direct write or mask) of a fully
cured polymer layer,
           b)   electron beam ablation of a cured polymer layer,
           c)   electron beam assisted direct write cross linking
followed by  development of a soft, uncured polymer layer and
subsequent curing of the remaining polymer layer,
           d)   exposing a positive working photosensitive polymer
layer to achieve partial dissolution of the layer during development
and create a channel of a given depth,
           e)   a direct mechanical embossing using a patterned die
to create a channel in a soft polymer layer with subsequent curing of
the remaining polymer layer.
      2)   Applying a second polymer layer over the channel produced
in step one.  This layer not only fills the channel created in layer
one but also provides a planar layer above the channel as per the
figure.

      The combined layers form a structure...