Browse Prior Art Database

Novel Debris Elimination Method for TAB Devices

IP.com Disclosure Number: IPCOM000107623D
Original Publication Date: 1992-Mar-01
Included in the Prior Art Database: 2005-Mar-22
Document File: 2 page(s) / 61K

Publishing Venue

IBM

Related People

Laycock, VA: AUTHOR [+3]

Abstract

During the excising operation of a Tape Automated Bonding (TAB) device, metallic slivers or debris are formed which manifest themselves as shorts during the bonding operation. (Image Omitted)

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 70% of the total text.

Novel Debris Elimination Method for TAB Devices

       During the excising operation of a Tape Automated Bonding
(TAB) device, metallic slivers or debris are formed which manifest
themselves as shorts during the bonding operation.

                            (Image Omitted)

      The disclosed method recommends the use of an electromagnet to
remove the debris during TAB excise and form operation.  The
ferromagnetic properties of the Ni diffusion barrier layer, present
between the Cu and Au metallization layers on the tape, renders any
metallic debris off the device ferromagnetic.  The debris can be
conveniently picked up by an electromagnet and later discharged
safely into a vacuum-equipped bin.

      There are three techniques that can be employed to remove
debris off the TAB device during excise and form operations as
follows:
      1.  After excising and forming the TAB device, two U-shaped
electromagnet units can be moved in over the device, approximately
0.200 inch from the formed heel, energized and moved away to
discharge the picked up debris into vacuum equipped bins as shown in
the figure.  For the ease of debris removal, it is recommended that
the vacuum ports holding the device D be disabled while the
electromagnets M1 and M2 are energized.
      2.  After excising and forming the TAB device, it is
transported to a presentation stage for subsequent pick up by a
thermode, which is the end-of-arm of a robot....