Browse Prior Art Database

Jet Plating Paddle

IP.com Disclosure Number: IPCOM000107656D
Original Publication Date: 1992-Mar-01
Included in the Prior Art Database: 2005-Mar-22
Document File: 2 page(s) / 66K

Publishing Venue

IBM

Related People

Bruun, NG: AUTHOR [+2]

Abstract

Disclosed is a device for improving the quality of plating in cavities and channels. This paddle will assist in the removal of bubbles trapped in cavities and channels, resupply of ions in cavities, and will provide for more homogeneous plating.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 67% of the total text.

Jet Plating Paddle

       Disclosed is a device for improving the quality of
plating in cavities and channels.  This paddle will assist in the
removal of bubbles trapped in cavities and channels, resupply of ions
in cavities, and will provide for more homogeneous plating.

      Horizontal paddle plating tanks have been in operation for many
years.  See Fig. 1.  The paddle traverses in the space between the
anode and the cathode, the purpose being to remove air and hydrogen
bubbles from the surface or channels to be plated and produce liquid
stirring in order to bring new metal ions to the plating surfaces.
There have been various designs for the paddles (see Fig. 2):
triangles, beams and double triangles.  All of these designs create a
lot of turbulence but have little effect on the surface, especially
if it is in a channel or at the bottom of a cavity.

      Our paddle creates a "jet curtain" of forced plating solution
on the surface, channels, or via holes on the cathode.  This is
achieved with a paddle that has two funnels (see Fig. 3).  As the
paddle moves through the tank, plating solution is forced into the
funnel and directed down onto the substrate by a flexible membrane
that acts like a flapper valve.  This creates a "jet curtain" forcing
solution into cavities and crevices on the substrate.  This forces
trapped bubbles from the pattern as well as introducing fresh
solution onto the plating surface.

      When the paddle is reversed the...