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Liquid Accordion Beam Steering Device for Excimer Laser

IP.com Disclosure Number: IPCOM000107851D
Original Publication Date: 1992-Mar-01
Included in the Prior Art Database: 2005-Mar-22
Document File: 1 page(s) / 38K

Publishing Venue

IBM

Related People

Goodman, D: AUTHOR

Abstract

Described here is a simple in-line device to vary the position and direction of a high-power excimer laser beam. The device is a liquid cell with two windows mounted in a flexible manner, for instance, by bellows, so that they can be tilted in either direction and translated axially. There is a reservoir for the liquid, so the windows can be moved in ways that change the volume of liquid between them. There are sufficient degrees of freedom to control both position and angle of the beam. (Image Omitted)

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Liquid Accordion Beam Steering Device for Excimer Laser

       Described here is a simple in-line device to vary the
position and direction of a high-power excimer laser beam. The device
is a liquid cell with two windows mounted in a flexible manner, for
instance, by bellows, so that they can be tilted in either direction
and translated axially.  There is a reservoir for the liquid, so the
windows can be moved in ways that change the volume of liquid between
them. There are sufficient degrees of freedom to control both
position and angle of the beam.

                            (Image Omitted)

      Purified water is a suitable liquid at g = 308 nm. There may
also be others, depending on the wavelength. Since this device is not
used for imaging, since, and since excimer beams are inherently
non-uniform, variations of refractive index within the liquid arising
from temperature variations are unimportant.

      The windows can be made of fused quartz, or another suitable
material.  They may be as thin as is practical mechanically, and
their tolerances are not tight.  To reduce reflection losses, the
windows can be AR coated on the outside.  The inside surfaces may
require no such coating, because of the near index match between the
liquid and the window material.