Browse Prior Art Database

Burr/ Nodule Height Detector

IP.com Disclosure Number: IPCOM000108160D
Original Publication Date: 1992-Apr-01
Included in the Prior Art Database: 2005-Mar-22
Document File: 1 page(s) / 50K

Publishing Venue

IBM

Related People

Busacco, RA: AUTHOR [+5]

Abstract

This invention is a tool which by design will detect a conductive protrusion with the base surface of a thin film product. The tool consists of a system which utilizes a vacuum plate (#1) for holding the substrate in a horizontal, flat position and a locating block (#2) which has intimate contact with the conductive surface in close proximity to the location of the suspect burrs/nodules. The locating block includes a conductive pad (#3), the size of which is in relation to the area of which the burrs/nodules are located. The pad is electrically isolated from that part of the block, making intimate contact with the base surface which is used as a reference surface.

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Burr/ Nodule Height Detector

      This invention is a tool which by design will detect a
conductive protrusion with the base surface of a thin film product.
The tool consists of a system which utilizes a vacuum plate (#1) for
holding the substrate in a horizontal, flat position and a locating
block (#2) which has intimate contact with the conductive surface in
close proximity to the location of the suspect burrs/nodules.  The
locating block includes a conductive pad (#3), the size of which is
in relation to the area of which the burrs/nodules are located.  The
pad is electrically isolated from that part of the block, making
intimate contact with the base surface which is used as a reference
surface.

      The pad being electrically isolated, as described above, is
positioned at a higher level than the referenced surface area of the
block.  A low-voltage DC battery, together with a lamp, is connected
to the pad and referenced area, such that when the block is placed on
top of the referenced area, the lamp will light up when the pad makes
contact to the conductive burr/nodule.  The method of alignment for
the block to the product can be accomplished using conventional
means, such as locating pins or alignment marks, as shown in the
figure.

      The difference in height between the pad and the referenced
surface of the block is dependent on the burr/nodule height
specification and should be set accordingly.

      An alternative use for this tool is a b...