Browse Prior Art Database

Preorientation Comb for Wafer Pusher

IP.com Disclosure Number: IPCOM000108326D
Original Publication Date: 1992-May-01
Included in the Prior Art Database: 2005-Mar-22
Document File: 1 page(s) / 30K

Publishing Venue

IBM

Related People

Losch, R: AUTHOR [+2]

Abstract

The article describes a means which is used in wafer handling apparatus to automatically load and unload wafer carriers. The carriers are provided with lateral grooves in which the wafers are held.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 100% of the total text.

Preorientation Comb for Wafer Pusher

       The article describes a means which is used in wafer
handling apparatus to automatically load and unload wafer carriers.
The carriers are provided with lateral grooves in which the wafers
are held.

      For loading and unloading the carrier, the wafers are handled
by a comb positioned on a pusher.  The comb is moved through the base
of the carrier and has a groove pitch corresponding to that of the
carrier into which the wafers are inserted or from which they are
removed.  In particular, during removal, it may happen that the
wafers, supported in the grooves with a slight play, end up in the
wrong grooves of the pusher comb and thus are damaged.

      By an additional preorientation comb (as illustrated), the
wafer is directly preoriented at the carrier support. As at that
point the tolerances are much smaller, the predetermined pitch will
not be exceeded.  The preorientation comb substantially improves the
pusher process of the wafers from the carrier.