Browse Prior Art Database

Producing Devices for Handling and Storing Semiconductor Wafers of PVDF

IP.com Disclosure Number: IPCOM000108330D
Original Publication Date: 1992-May-01
Included in the Prior Art Database: 2005-Mar-22
Document File: 1 page(s) / 41K

Publishing Venue

IBM

Related People

Gall, H: AUTHOR [+2]

Abstract

A special material, PVDF (polyvinylidene fluoride), is described which improves and is used in devices for handling and storing semiconductor wafers.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 87% of the total text.

Producing Devices for Handling and Storing Semiconductor Wafers of PVDF

       A special material, PVDF (polyvinylidene fluoride), is
described which improves and is used in devices for handling and
storing semiconductor wafers.

      Semiconductor process (mini) environments, as well as bearings
and containers (such as wafer and SMIF (standard mechanical
interface) boxes), are normally made of plastic materials which,
because of their production process and chemical composition, lead to
diffusion of spurious and sometimes etching chemical constituents and
thus to damage or destruction of the extremely sensitive wafer
surfaces. Such materials include polyvinyl chloride, polycarbonate,
polyacryl, Teflon PFA*, etc.   At the same time, such materials are
subject to very high static loads (10 - 60 KeV/cm) which attract
surrounding particles and are transferred to the product upon
reloading.

      Spontaneous electrostatic dissipation (ESD) additionally
damages or permanently destroys sensitive structures on the wafer
surfaces.

      Therefore, it is proposed to produce the described devices for
handling, transferring and storing wafers from PVDF.  PVDF is a
plastic material which, in addition to having an extremely high
chemical and mechanical resistance, is extremely easy to process, so
that chemical constituents are practically prevented from diffusing
into the product and static loads are reduced to a minimum.

      By producing semiconductor proc...