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Browse Prior Art Database

Wire Grid for Fabrication of Very Fine Wires

IP.com Disclosure Number: IPCOM000108435D
Original Publication Date: 1992-May-01
Included in the Prior Art Database: 2005-Mar-22
Document File: 1 page(s) / 83K

Publishing Venue

IBM

Related People

Chalco, P: AUTHOR [+2]

Abstract

A grid concept is used to fabricate metallic wire segments with very fine features patterned lithographically. This wire fabrication concept provides a simple structure which facilitates significantly the handling and positioning tasks of the wire.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 98% of the total text.

Wire Grid for Fabrication of Very Fine Wires

      A grid concept is used to fabricate metallic wire segments with
very fine features patterned lithographically.  This wire fabrication
concept provides a simple structure which facilitates significantly
the handling and positioning tasks of the wire.

      Due to a continuous decrease in size of the wire used (down to
a fraction of a human hair), the handling operations of the wire to
position and align it over the targeted area has now become severely
demanding of operator skills (eye and hand dexterity) to position the
wire accurately and steadily without damaging the fragile wire
itself.

      As shown in Figure 1, the disclosed invention consists of a
wire grid containing a plurality of rows of identical wires. Each
individual wire is surrounded by neighboring wires which provide the
necessary support for safe handling of the wire.  Once bonded, the
wire can be pulled for detachment from the grid while the surrounding
structure of neighboring wires provides the support necessary to
prevent damage of the bonded wire segment.

      The wire-grid is fabricated using a lithographic metal
patterning and etching thru-mask called subtractive etching. In this
method the wire configuration is patterned on an etch resist film
over a thin sheet of metal (such as copper).  The exposed metal is
then etched away and the resist removed leaving behind a pattern of
connected wires as shown in Figure 1.

      Di...