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Method of Fabricating High Temperature Superconducting Thin Films from a Single Bulk Material Source

IP.com Disclosure Number: IPCOM000108473D
Original Publication Date: 1992-Jun-01
Included in the Prior Art Database: 2005-Mar-22
Document File: 2 page(s) / 73K

Publishing Venue

IBM

Related People

Chance, D: AUTHOR [+8]

Abstract

A technique is described whereby high temperature superconducting thin films are fabricated from a single bulk material source. The thin film fabricating technique is applicable to any multi-component high transition temperature superconducting system that can be fabricated in a stable form in bulk, and is even applicable to the formation of thin film systems that may not be stable in bulk form.

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Method of Fabricating High Temperature Superconducting Thin Films from a Single Bulk Material Source

       A technique is described whereby high temperature
superconducting thin films are fabricated from a single bulk material
source.  The thin film fabricating technique is applicable to any
multi-component high transition temperature superconducting system
that can be fabricated in a stable form in bulk, and is even
applicable to the formation of thin film systems that may not be
stable in bulk form.

      The technique of fabricating high temperature superconducting
films centers upon sputtering from a single target and possibly with
subsequent annealing.  Positioning of the substrate is important so
as to avoid resputtering effects and in obtaining near perfect
stoichiometric film depositions.

      The method used builds on currently known radio frequency (RF)
magnetron reactive sputtering techniques.  A sintered metallic
single- phase sputtering target is employed as the source of material
in the proper stoichiometric ratio.  Xenon is a preferred sputtering
gas over the conventionally used Argon because higher sputtering
rates can be achieved.  Oxygen deficiency in films sputtered with
pure noble gases is remedied by using an oxygen-noble gas mixture and
by post annealing in oxygen.  Elevated substrate temperatures help
in-situ formation of the proper structure for high temperature
superconductivity.

      Using a single-phase target of the superconducting oxide
material has the advantage of being hig...