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Materials for the Integration of Hight TC Superconductor with Silicon

IP.com Disclosure Number: IPCOM000108762D
Original Publication Date: 1992-Jun-01
Included in the Prior Art Database: 2005-Mar-22
Document File: 2 page(s) / 59K

Publishing Venue

IBM

Related People

Chisholm, M: AUTHOR [+4]

Abstract

Silicon adversely affects the superconducting properties of copper-oxide-based systems. In order to integrate silicon electronic technologies with superconducting technologies, barrier layers are needed which will preserve the integrity of each of these devices. We have identified several systems that are effective barrier layers to the interdiffusion of these two material systems.

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Materials for the Integration of Hight TC Superconductor with Silicon

       Silicon adversely affects the superconducting properties
of copper-oxide-based systems.  In order to integrate silicon
electronic technologies with superconducting technologies, barrier
layers are needed which will preserve the integrity of each of these
devices.  We have identified several systems that are effective
barrier layers to the interdiffusion of these two material systems.

      The metallurgical requirements for the two layers are as
follows:
      1.  The first layer (material A) must be a good barrier to the
out-diffusion of Si and in-diffusion of the second layer (material
B).
      2.  Material B must be chemically inert to the superconductor,
that is, (a) there should be no interdiffusion and (b) it  should not
degrade the superconductivity should it diffuse into the bulk of the
YBa2Cu3O7.
      3.  The first layer and the second layer should not
interdiffuse           into each other.

      The following specific examples illustrate the application of
this concept:
EMBODIMENT 1:
      Si/CaF2/BaF2/YBa2Cu3O7 structure.

      CaF2 can be deposited onto Si epitaxially and is chemically
stable with Si, and, therefore, it can serve as Material A.  BaF2 has
been shown to be chemically inert to YBa2Cu3O7, and, therefore, it
can serve as Material B. Furthermore, CaF2 and BaF2 do not react with
each other. Therefore, this is one appr...