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Superconducting Thin Film using Spray Deposition of Acetate Pre-cursors

IP.com Disclosure Number: IPCOM000108764D
Original Publication Date: 1992-Jun-01
Included in the Prior Art Database: 2005-Mar-22
Document File: 2 page(s) / 68K

Publishing Venue

IBM

Related People

Gupta, A: AUTHOR [+2]

Abstract

Described is a fabrication process to produce superconducting thin films by using spray deposition of acetate precursors. The process provides a reproducible, simple and inexpensive technique for depositing superconducting thin films.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 57% of the total text.

Superconducting Thin Film using Spray Deposition of Acetate Pre-cursors

       Described is a fabrication process to produce
superconducting thin films by using spray deposition of acetate
precursors.  The process provides a reproducible, simple and
inexpensive technique for depositing superconducting thin films.

      In prior art, inorganic nitrate precursors of yttrium, barium
and copper have been processed for spray deposition of
superconducting thin films of Y1Ba2Cu3O7-8.  The concept described
herein extends the prior-art process through the use of
metallo-organic precursors for preparing superconducting films by
means of spray depositions.  The superconducting films are prepared
using a solution of the acetate precursors of yttrium, barium and
copper, with a cation ratio of 1:2:3.

      Films of Y1Ba2Cu3O7-8 have been prepared using the following
procedure:  A mixed acetate powder (yttrium, barium and copper) is
prepared by mixing stoichiometric amounts of yttrium oxide, barium
carbonate and copper oxide (Y:Ba:Cu ratio of 1:2:3) with acetic acid
and then evaporating to dryness to remove any excess acid.  A dilute
solution (1-2 wt.%) of the mixed acetate Ag is then prepared by the
addition of water.  The solution is sprayed on the substrate of
choice (magnesium oxide, strontium titanate, etc.) using a fine air
brush with nitrogen as the carrier gas, or an ultrasonic sprayer.

      The substrate is kept at an elevated temperature (180-300o C)
...