Browse Prior Art Database

Method of Measurement for Temperatures of Ion Deposition Processes

IP.com Disclosure Number: IPCOM000108897D
Original Publication Date: 1992-Jun-01
Included in the Prior Art Database: 2005-Mar-23
Document File: 1 page(s) / 59K

Publishing Venue

IBM

Related People

Bellar, RJ: AUTHOR [+2]

Abstract

Ion deposition of metals and insulators on silicon substrates and other materials is a common process in the magnetic head development industry as well as other similar industries. The process is carried out in a chamber usually at high vacuum and under other hostile conditions not conducive to common temperature measurement techniques.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 67% of the total text.

Method of Measurement for Temperatures of Ion Deposition Processes

      Ion deposition of metals and insulators on silicon substrates
and other materials is a common process in the magnetic head
development industry as well as other similar industries.  The
process is carried out in a chamber usually at high vacuum and under
other hostile conditions not conducive to common temperature
measurement techniques.

      The temperature of the deposition process is, at the very
least, critical in the ability to control the process in the event of
failure and important as a method of monitoring process control.
Since the entire process takes place at the surface of the substrate
it is desirable to measure the temperature only there.  Temperature
recording devices, such as optical pyrometers, laser interferometry,
thermocouples, RTD's and other similar devices, all have serious
drawbacks when placed in this hostile environment. They either are
destroyed, emit unwanted substances into the chamber or have data
acquisition shortcomings.  Irreversible temperature-sensitive
indicators show the best characteristics for these measurements but
commercially available indicators are available in the form of labels
and are not suitable for this application.

      Irreversible temperature-sensitive indicator material turns
color, usually from a silver to black, at a calibrated temperature
and has an accuracy of +/-1%.  This material reacts to its calibrated
temperature in abo...