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Improved High Temperature Superconductor Film Growth Technique

IP.com Disclosure Number: IPCOM000108912D
Original Publication Date: 1992-Jul-01
Included in the Prior Art Database: 2005-Mar-23
Document File: 1 page(s) / 46K

Publishing Venue

IBM

Related People

Jackson, TN: AUTHOR [+2]

Abstract

Disclosed is an alternative technique to provide atomic oxygen by using a deep ultraviolet light source to dissociate molecular oxygen. This approach offers the important advantage of simplicity. Only a simple UV lamp is required. Examples of lamps include a Mercury (Hg) low pressure, Hg short arc, deterium, or other UV sources.

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Improved High Temperature Superconductor Film Growth Technique

       Disclosed is an alternative technique to provide atomic
oxygen by using a deep ultraviolet light source to dissociate
molecular oxygen.  This approach offers the important advantage of
simplicity.  Only a simple UV lamp is required.  Examples of lamps
include a Mercury (Hg) low pressure, Hg short arc, deterium, or other
UV sources.

      The first high-temperature superconductor (HTS) films of the
so-called 123 type were deposited in the tetragonal phase and
subsequently oxidized at high temperature to the desired
superconducting orthorhombic phase.  There has been much effort
directed toward growing high quality films already in the
superconducting phase and requiring no post deposition oxidation.
Recently, it has been shown that the presence of atomic oxygen or
ozone is important for such growth.  Usually, the atomic oxygen or
ozone is provided from a discharge or ECR plasma.  This has the
disadvantage that the molecular oxygen dissociation is linked to the
creation of oxygen ions which may be deleterious to film growth.
Also, it is difficult to provide a high density of atomic oxygen.

      The lamp source provides atomic oxygen (and/or ozone) with
small heat input and while producing almost no ions.  This UV source
can either illuminate the growing film or not.  That is, the atomic
oxygen production is largely decoupled from the total system energy
input as far as the growing fi...