Browse Prior Art Database

High Performance Lateral Loop Bipolar Transistor

IP.com Disclosure Number: IPCOM000110057D
Original Publication Date: 1992-Oct-01
Included in the Prior Art Database: 2005-Mar-25
Document File: 4 page(s) / 155K

Publishing Venue

IBM

Related People

Warnock, J: AUTHOR

Abstract

Disclosed is a new device structure for lateral bipolar transistors. The structure is compact with minimal parasitics, allows for narrow base widths and features self-aligned E-B, C-B, and C-E contact spacings.

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High Performance Lateral Loop Bipolar Transistor

       Disclosed is a new device structure for lateral bipolar
transistors.  The structure is compact with minimal parasitics,
allows for narrow base widths and features self-aligned E-B, C-B, and
C-E contact spacings.

      The transistor is fabricated in an integrated process by
itself, or in a BiCMOS process, or as a pnp and/or npn in a
complementary bipolar process or complementary BiCMOS process. The
device to be described features:
     1) A compact structure, not requiring deep trench isolation to
achieve low collector-substrate capacitance.
     2) Minimal parasitic capacitances and resistances. Collector,
emitter, and base contacts are all self-aligned to the device, with
self-aligned silicides to provide low resistances.  Collector and
emitter contacts are formed by out-diffusion from polysilicon which
lies on oxide, thereby reducing parasitic capacitances.
     3) The structure can be tailored to provide a base width which
is much smaller than that attainable with conventional lateral
structures.
     4) In a conventional npn process, a lateral loop pnp can be
added by the addition of only two lithography masking steps, similar
to that required for a more conventional lateral pnp.

      The process starts with the definition of the active device
area (i.e., the "loop").  One way of defining active device areas is
during the definition of the shallow trench isolation (STI) as shown
in Fig. 1.  A stack of polysilicon/nitride/polyimide/oxide is
patterned a...