Original Publication Date: 1992-Sep-01
Included in the Prior Art Database: 2005-Mar-25
Brown, ME: AUTHOR [+2]
This article describes an aperture pin device which can be used to locate the position of a greensheet and also to calibrate electron beam (E-beam) equipment.
describes an aperture pin device which can
be used to locate the position of a greensheet and also to calibrate
electron beam (E-beam) equipment.
greensheet is aligned to an E-beam process tool by
manual means. The device of this disclosure allows the greensheets
on a carrier to be loaded onto a stage automatically, without
breaking vacuum. The aperture pin integrates the disk (pinhole) into
the locating pins. The electron beam then finds the pinholes and
establishes a coordinate reference for each new carrier. This is
accomplished using a least squares fit of the four pinholes. The
aperture pins are also marked for concentricity. These marks are
turned towards the center of the sheet to minimize errors in pinhole
location due to concentricity.
pin is a two-piece construction, as shown in Figs.
1a and 1b. It was made from two pieces to reduce cost without losing
any function. The outer piece 1 is hardcoated aluminum. The inner
piece 2 is either molybdenum or platinum. The two pieces are pressed
together. The inner piece 2 has a thin section shown in Fig. 2, in
which a small hole 3, is drilled concentric to the outside diameter
of the outer piece 1. The outer piece 1 is then marked to establish
the amount and direction of the eccentricity 4. An electron beam is
focused through the small hole 3 to a receiver. This is used by the
system to locate the position of th...