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Leakage Detection System Adapted to Oxidation and Diffusion Furnaces

IP.com Disclosure Number: IPCOM000110280D
Original Publication Date: 1992-Nov-01
Included in the Prior Art Database: 2005-Mar-25
Document File: 2 page(s) / 39K

Publishing Venue

IBM

Related People

Deseez, C: AUTHOR

Abstract

The present system allows to detect any airtightness defect between a quartz door and a process tube flange for typical oxidation/diffusion furnaces. Three parts are involved in this system, as illustrated in the above figure: 1. A quartz or silicon carbide process tube with a groove in the flange thickness; 2. A vacuum system, with a manometer, a venturi, an electrovalve to cause a depression in the flange groove; 3. A vacuum switch which analyzes this depression and sends the information to the equipment controller. The controller gives an alarm message if any leak in the airtightness door is detected.

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Leakage Detection System Adapted to Oxidation and Diffusion Furnaces

       The present system allows to detect any airtightness
defect between a quartz door and a process tube flange for typical
oxidation/diffusion furnaces.  Three parts are involved in this
system, as illustrated in the above figure:
  1.  A quartz or silicon carbide process tube with a groove in the
flange thickness;
  2.  A vacuum system, with a manometer, a venturi, an electrovalve
to cause a depression in the flange groove;
  3.  A vacuum switch which analyzes this depression and sends the
information to the equipment controller.  The controller gives an
alarm message if any leak in the airtightness door is detected.

      The processing mode is as follow:

      To begin the process step (oxidation/diffusion/anneal), the
quartz door lies flat on the flange tube process. The equipment
controller activates the electrovalve and venturi to cause a
depression between the process tube flange and the quartz door.  The
vacuum switch analyzes this depression and converts into binary
electrical information.  This information is converted to on alarm if
the depression value does not conform to a predetermined value.  If
the depression value is good, the processing steps can take place.

      In summary, this system can:
      - Control and measure the airtightness of closed doors and then
generate reliable information.
      - Allow processing in real time.
      - P...