Browse Prior Art Database

Dual Dispense Head

IP.com Disclosure Number: IPCOM000110437D
Original Publication Date: 1992-Nov-01
Included in the Prior Art Database: 2005-Mar-25
Document File: 1 page(s) / 49K

Publishing Venue

IBM

Related People

Mathe, RJ: AUTHOR [+2]

Abstract

Automated tools which dispense relatively low viscosity chemicals such as photoresist on to semiconductors are well known in the art. Higher viscosity chemicals such as polyimides are also used in semiconductor processing. However, polyimide cannot be automatically dispensed using the existing dispense heads of the standard automated tools due to the very small diameter of the dispense lines. Uniformity of the process was poor and frequently required hand dispensing of the polyimide.

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Dual Dispense Head

      Automated tools which dispense relatively low viscosity
chemicals such as photoresist on to semiconductors are well known in
the art.  Higher viscosity chemicals such as polyimides are also used
in semiconductor processing.  However, polyimide cannot be
automatically dispensed using the existing dispense heads of the
standard automated tools due to the very small diameter of the
dispense lines.  Uniformity of the process was poor and frequently
required hand dispensing of the polyimide.

      An improved dispense head was designed to allow the automatic
dispense of polyimide-type materials.  A larger diameter dispense
line 1 attached by means of fitting 2 to the dispense head 3 allowed
the higher viscosity material to be accurately measured.  Fittings 4
and 5 clamp the dispense head 3 to a robot arm (not shown).  Other
features of the dispense head include, replaceable/disposable Teflon
dispense tips 6 attached to the dispense head 3 by means of hose
connector 7.  The dispense head is an easily removable assembly for
cleaning.  After the head is removed for cleaning, it can be
reinstalled without losing the head position over the substrate.
Also, the replaceable dispense tip 6 allowed simple replacement of
the tip 6 after every start of the spin apply operation to remove
crusted material.  In the past, the entire line would be replaced
adding to machine down time.  The larger, more durable dispense lines
have translated to a more...