Browse Prior Art Database

Vacuum Attachment

IP.com Disclosure Number: IPCOM000110711D
Original Publication Date: 1992-Dec-01
Included in the Prior Art Database: 2005-Mar-25
Document File: 1 page(s) / 46K

Publishing Venue

IBM

Related People

Clark, RK: AUTHOR [+2]

Abstract

A vacuum attachment for process chambers is described that surrounds the chamber opening so that foreign materials generated by chamber cleaning are swept directly into a vacuum cleaner instead of being released into the surrounding atmosphere. The vacuum attachment allows the operator's arms and cleaning tools to pass through the cleaning opening with no obstruction.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 98% of the total text.

Vacuum Attachment

      A vacuum attachment for process chambers is described that
surrounds the chamber opening so that foreign materials generated by
chamber cleaning are swept directly into a vacuum cleaner instead of
being released into the surrounding atmosphere.  The vacuum
attachment allows the operator's arms and cleaning tools to pass
through the cleaning opening with no obstruction.

      The vacuum attachment is mounted on a typical process chamber
as shown in the Figure.  The assembly consists of five major
components.
      1.  The base which mounts the vacuum attachment to the process
chamber at the source opening.
      2.  The outer ring which forms a vacuum seal that surrounds the
inner ring.
      3.  The vacudaptor which mounts on the outer ring to connect
the inner ring to a vacuum hose connector such as a modified NILFISK
vacuum nozzle (made by Nilfisk of America, Inc.).
      4.  The inner ring which has angled openings to allow air and
particles suspended in the air to enter the attachment.
      5.  The top ring which seals the outer and inner rings to the
base.

      The vacuum attachment creates a turbulent 360-degree vortex
about the source opening that draws air and suspended particles
through the openings in the inner ring, through the vacuum nozzle,
through the vacuum hose and into the vacuum cleaner bag.  The vacuum
cleaner should be of the typical Class 10 cleanroom explosion-proof
type.

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