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Low Temperature Chemical Vapor Deposition of Poly- (1,4-Phenyl encazine-di-N-oxide

IP.com Disclosure Number: IPCOM000111000D
Original Publication Date: 1994-Jan-01
Included in the Prior Art Database: 2005-Mar-26
Document File: 2 page(s) / 32K

Publishing Venue

IBM

Related People

Hacker, N: AUTHOR [+3]

Abstract

This article describes the synthesis and Chemical Vapor Deposition (CVD) of poly- (1,4-phenyleneazine-di-N-oxide).

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This is the abbreviated version, containing approximately 100% of the total text.

Low Temperature Chemical Vapor Deposition of Poly- (1,4-Phenyl encazine-di-N-oxide

      This article describes the synthesis and Chemical Vapor
Deposition (CVD) of poly- (1,4-phenyleneazine-di-N-oxide).

      Chlorine gas was added to an aqueous suspension of
benzoquinonedioxime in a distillation apparatus.  A greenish-yellow
material turned to a yellow solid co-distilled with water.  The
yellow solid was filtered and then sublimed to give the pure polymer,
poly- (1,4-phenylenezine-Di-N-Oxide (PADNO).

      The PADNO polymer prepared by the above procedure upon heating
from room temperature to about 80ºC for 1-10 minutes could be
volatilized and deposited as a film (0.3 -40 &mu.M) onto a suitable
substrate.  The resultant film was inert to organic solvents, aqueous
base and concentrated acids (except nitric acid) and appeared to be
stable indefinately at room temperature.  However, the film could be
removed from the substrate by heating to temperatures above
100ºC at atmospheric pressure.  A potential use for this
polymer is as an anti-reflection coating, as 0.4 &mu.M thick film is
totally absorbing from 200-450 nm.

      Thus, PADNO is a CVD polymer which is volatilized via its
monomer which can then re-polymerize.  This material can be recycled
multiple times; the films have lifetimes at room temperature of more
than a year, and may be useful as anti-reflection coatings.