Browse Prior Art Database

Honeycomb Mask for Thin Film Sputtering

IP.com Disclosure Number: IPCOM000111166D
Original Publication Date: 1994-Feb-01
Included in the Prior Art Database: 2005-Mar-26
Document File: 2 page(s) / 35K

Publishing Venue

IBM

Related People

Rossi, EM: AUTHOR [+3]

Abstract

Disclosed is a "honeycomb" mask for use with thin film sputtering apparatus, such use significantly increasing the hardness of sputtered carbon films and thereby significantly improving their wear resistance.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 94% of the total text.

Honeycomb Mask for Thin Film Sputtering

      Disclosed is a "honeycomb" mask for use with thin film
sputtering apparatus, such use significantly increasing the hardness
of sputtered carbon films and thereby significantly improving their
wear resistance.

      In thin-film disks, uniformity of coating, wear-resistance and
low stiction are desirable characteristics.  These properties may be
enhanced by increasing the hardness of the coating material used.
One known method of improving the hardness of carbon coatings is the
incorporation of hydrogen in the sputtering process.

      Hardness is decreased, however, when sputtered material arrives
at the substrate at a high angle of incidence.  By collimating this
flux, hardness in the resulting coating is substantially increased.

      Collimating is achieved by using the honeycomb mask disclosed
herein.  The honeycomb mask eliminates the high-angle component and
at the same time allows for uniform deposition over the substrate.
In a preferred embodiment, masks are made of Iconel with a depth of
.375 inches and aspect ratio of 1/1.  When compared to disks produced
by prior art methods,  substantial increase in hardness (33%) was
observed in disks produced with the honeycomb mask, even with reduced
incorporation of hydrogen in the films (28 --> 21 at%).

      Implementation of this invention is straightforward, since
these honeycomb structures are inexpensive to produce in large
quantities.  Moreove...