Browse Prior Art Database

Radiation Imageable Metal Seeders

IP.com Disclosure Number: IPCOM000111385D
Original Publication Date: 1994-Feb-01
Included in the Prior Art Database: 2005-Mar-26
Document File: 2 page(s) / 76K

Publishing Venue

IBM

Related People

Angelopoulos, M: AUTHOR [+5]

Abstract

Disclosed are compositions of matter that can be utilized as radiation imageable metal seeders and processes thereof for electroless or electrolytic metallization.

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This is the abbreviated version, containing approximately 76% of the total text.

Radiation Imageable Metal Seeders

      Disclosed are compositions of matter that can be utilized as
radiation imageable metal seeders and processes thereof for
electroless or electrolytic metallization.

      The parent, Unsubstituted polyaniline (PANI) in the
non-conducting form has been previously reported to spontaneously
reduce noble metal ions such as  'Pd' sup 2+  and  'Ag' sup+1 to
their zerovalent metallic forms when the polymer is immersed into an
aqueous solution of the corresponding metal salt [*].  Thin films of
'Pd' sup0 and 'Ag' sup 0 deposit on the PANI surface without the
introduction of any external reducing agent.  The metal coated PANI
can subsequently be used for electrolytic or electroless copper
metallization.

      This method discloses selected PANI derivatives as radiation
imageable seeders.  These derivatives are ring substituted
polyanilines in which the ring substituent is a cross-linkable group.
Upon irradiation to ultraviolet/visible, electron-beam or x-ray,
these materials cross-link forming negative resists capable of
delineating submicron patterns.  The Figure depicts patterned 0.5

&mu.m lines in a 0.25 &mu.m thick film of one of these PANI
materials.

      The ring substituted PANI derivatives spontaneously reduce
noble metal ions similarly to the parent unsubstituted PANI case.
The palladium seeded PANI surface was studied using Atomic Force
Microscopy (AFM).  AFM images indicate a nominal size of 65nm for the
p...