Browse Prior Art Database

Miniaturized Ellipsometer

IP.com Disclosure Number: IPCOM000111607D
Original Publication Date: 1994-Mar-01
Included in the Prior Art Database: 2005-Mar-26
Document File: 2 page(s) / 44K

Publishing Venue

IBM

Related People

Kiefer, E: AUTHOR [+3]

Abstract

Avoidance of mechanical movement of any optical device which will enable miniaturization of an ellipsometer is described in this article.

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This is the abbreviated version, containing approximately 89% of the total text.

Miniaturized Ellipsometer

      Avoidance of mechanical movement of any optical device which
will enable miniaturization of an ellipsometer is described in this
article.

      Linear polarized monochromatic light is incident on the probe.
The reflected light will be collected by a set of polarizing fibres
followed by a diode detector array.

      Each fibre will belong to one field of the detector array.
Assuming that there is an equal distribution of all polarizing
directions on the set of fibres, a rotating analyzer is simulated.
The quarter-wave retarder of the usual ellipsometer arrangement can
be either replaced by an additional installation using circular
polarized light or the use of an electro-optical phase shifter.

A strip of polarized monochromatic light is incident on a phase
shifting gradient plate.

This plate may be a thickness gradient of a dielectric material
(i.e., SiO[2]) on a reflecting surface (i.e., a Si-wafer).  Thus the
state of polarization will change continuously from one end of the
strip to the other.  This plate will replace the rotating polarizer
and the quarter wave retarder used in common ellipsometric
arrangements.  After reflection on the probe, the light will proceed
to the analyzing section which consists of a polarizing beam splitter
and two-diode detector arrays.  Polarizing beam splitters can be
produced by depositing an alternating multilayer of two different
transparent materials (i.e., ZrO[2]  and SiO[2]) on a glass...