Dismiss
InnovationQ will be updated on Sunday, Oct. 22, from 10am ET - noon. You may experience brief service interruptions during that time.
Browse Prior Art Database

Miniaturized Multi-Angle Ellipsometer

IP.com Disclosure Number: IPCOM000111699D
Original Publication Date: 1994-Mar-01
Included in the Prior Art Database: 2005-Mar-26
Document File: 2 page(s) / 33K

Publishing Venue

IBM

Related People

Kiefer, E: AUTHOR [+2]

Abstract

The avoidence of mechanical movement of any optical device which will enable miniaturization of an ellipsometer is described in this article.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 100% of the total text.

Miniaturized Multi-Angle Ellipsometer

      The avoidence of mechanical movement of any optical device
which will enable miniaturization of an ellipsometer is described in
this article.

      The divergence of diode lasers can be used to build a
multi-angle ellipsometer.  A divergence of only 5 degrees from the
centre will provide light with angles of incidence ranging from 60
º-to-70 º.  A glass plate at the Brewster angle will be
used as a polarizing beam-splitting device.  Diode detector arrays
will read out all angular measurements simultaneously.  The imperfect
beam splitting with regard to the direction of polarization can be
mathematically resolved in contributions coming from s- and p-light
by using the intensity information from the corresponding reflected
and transmitted light beam.

      To have a small measuring spot size there is the possibility of
focusing all light beams incident at different angles on the same
spot by using an elliptically shaped mirror, with the two focus
points being the measuring spot and the light source.