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Browse Prior Art Database

Scraper Device for Conditioning Memory Disk Polish Pads

IP.com Disclosure Number: IPCOM000111833D
Original Publication Date: 1994-Apr-01
Included in the Prior Art Database: 2005-Mar-26
Document File: 2 page(s) / 31K

Publishing Venue

IBM

Related People

Berg, JS: AUTHOR [+4]

Abstract

A scraper device for conditioning polish pads on planetary memory disk polishing machines (SPEEDFAM DSM-type machines). These scraper devices allow conditioning of polish pads automatically using the machine cycle.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 100% of the total text.

Scraper Device for Conditioning Memory Disk Polish Pads

      A scraper device for conditioning polish pads on planetary
memory disk polishing machines (SPEEDFAM DSM-type machines).  These
scraper devices allow conditioning of polish pads automatically using
the machine cycle.

      The scraper device consists of a spider 1 in which pucks 2 are
inserted and held in place with snap rings 3.  The pucks fit snugly
but have freedom to float to an equal common height.  Typically, five
scraper devices would be used when conditioning polish pads in a
SPEEDFAM 18B DSM polish machine.  The scraper devices are set in the
planetary gears of the polish machine and run through a normal cycle
with appropriate speeds and pressures (Figure).