Browse Prior Art Database

Locating Fine Leaks in High Vacuum Apparatus

IP.com Disclosure Number: IPCOM000111861D
Original Publication Date: 1994-Apr-01
Included in the Prior Art Database: 2005-Mar-26
Document File: 2 page(s) / 25K

Publishing Venue

IBM

Related People

Barnes, R: AUTHOR

Abstract

Disclosed is a method used to identify fine leaks in high vacuum systems. After locating the general area of the vacuum leak with standard helium leak detection equipment, a suitable liquid dye is applied to areas where the potential for a leak exists. Subsequent disassembly and examination will reveal the leakage path marked by the dye.

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Locating Fine Leaks in High Vacuum Apparatus

      Disclosed is a method used to identify fine leaks in high
vacuum systems.  After locating the general area of the vacuum leak
with standard helium leak detection equipment, a suitable liquid dye
is applied to areas where the potential for a leak exists.
Subsequent disassembly and examination will reveal the leakage path
marked by the dye.

      Following is an example how this method was successfully
employed.  The ion source area of an ion implanter could only reach a
base vacuum of 1x10-6 torr, where 5x10-7 torr is typical.  A standard
helium leak detector showed that the leak was in the ion source
flange area which contains multiple feedthroughs, each with the
potential for leaking.  A commercially available alcohol-based
red-layout fluid typically used in machine shops was applied to these
areas with a syringe.  Disassembly revealed that there was a small
void in a weld on the flange.  The red dye marking the void allowed
the assembly to be successfully repaired.