Browse Prior Art Database

Diamond-Like Carbon Coatings for Deformable Surface Display Devices

IP.com Disclosure Number: IPCOM000112099D
Original Publication Date: 1994-Apr-01
Included in the Prior Art Database: 2005-Mar-26
Document File: 2 page(s) / 33K

Publishing Venue

IBM

Related People

Brady, MJ: AUTHOR [+3]

Abstract

Texas Instruments has a body of issued patents on surface deformable devices. A silicon wafer is processed to put the usual circuitry in place, then on top of the circuitry, moveable flat mirrors with dimensions of the order of 20 microns are placed. These mirrors are made with the usual microlithography and selective etching processes used for micromechanical constructs. The mirrors are moved by electrostatic forces between the mirror and the electrodes. In the patents, reference is made to SiO&sub2. insulating films to keep the metal grounded film of the mirror from shorting out to the control electrode shown. Mention is also made in the patents about abrasion of the moving parts.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 96% of the total text.

Diamond-Like Carbon Coatings for Deformable Surface Display Devices

      Texas Instruments has a body of issued patents on surface
deformable devices.  A silicon wafer is processed to put the usual
circuitry in place, then on top of the circuitry, moveable flat
mirrors with dimensions of the order of 20 microns are placed.  These
mirrors are made with the usual microlithography and selective
etching processes used for micromechanical constructs.  The mirrors
are moved by electrostatic forces between the mirror and the
electrodes.  In the patents, reference is made to SiO&sub2.
insulating films to keep the metal grounded film of the mirror from
shorting out to the control electrode shown.  Mention is also made in
the patents about abrasion of the moving parts.

      Disclosed is a method whereby a film of Diamond-Like Carbon
(DLC) a few hundred A  thick can be conformably deposited over the
complete device.  This film will be much harder than the SiO&sub2.
film used presently, and will wear much longer.  The film is
transparent at this thickness, and also acts as a good insulator.  It
will reduce the sticking of the mirror to the supporting silicon
structure, when the mirror come into contact with it.  In addition,
the film has good adhesion, and can be conformally deposited at low
temperature.  DLC is chemically inert and will prevent corrosive
attack of the aluminum mirror surface.  The high wear resistance of
DLC will also reduce particle formation w...