Browse Prior Art Database

Fine Adjustment of Toolbits in Micromilling Spindles

IP.com Disclosure Number: IPCOM000112156D
Original Publication Date: 1994-Apr-01
Included in the Prior Art Database: 2005-Mar-26
Document File: 2 page(s) / 73K

Publishing Venue

IBM

Related People

Renz, U: AUTHOR

Abstract

This article describes a fine adjustment means for toolbits in micromilling spindles.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 54% of the total text.

Fine Adjustment of Toolbits in Micromilling Spindles

      This article describes a fine adjustment means for toolbits in
micromilling spindles.

      Micromilling equipment, using specially polished natural
diamonds mounted in steel holders as milling tools, is currently used
to produce ultrafine surfaces of laser mirror quality (peak-to-valley
depths lt 50 nm).  Improvements have been made by IBM to allow the
production of planar (pm 0.1 my/200 mm) ultrafine (peak-to-valley
depth lt 50 nm) and thickness-tolerated (pm 0.5 my) thin-film layers
in multilayer ceramic technology.  For the required tolerances of pm
0.1 my, the fine-cutting diamond in the air-cushioned milling spindle
must be adjustable in the Z-direction relative to a previously milled
surface or to the other toolbits.  To meet this requirement for
fine-cutting diamonds, the invention described in this article
assumes that all movable components are adjustable without
tolerances.

      Referring to Figs. 1 and 2, diamond holder 1 is inserted into
dovetail guide 2 and held in place by clamping screw 3.  By
tightening screw 6, actuating a clamping wedge 5, guide 2 is guided
without backlash in housing 4.  Guide 2 is adjusted in the
Z-direction by coarse-adjustment ring 8 and fine-adjustment ring 7.
This ring combination was chosen for accuracy and to permit a
relatively long path of adjustment.  Coarse-adjustment ring 8 is held
in the Z-axis by several guide jaws 9 fitted to the circumference...