Browse Prior Art Database

Use of a Diamond Thin-Film on a Silicon Lens/Heat-Sink

IP.com Disclosure Number: IPCOM000112703D
Original Publication Date: 1994-Jun-01
Included in the Prior Art Database: 2005-Mar-27
Document File: 2 page(s) / 41K

Publishing Venue

IBM

Related People

Cuomo, JJ: AUTHOR [+4]

Abstract

Disclosed is the concept of using a diamond thin-film on the bottom surface of a Silicon Lens/Heat-Sink (SLHS). This thin-film will extend the life of the lens/heat-sink, improve the optical coupling between the lens and the sample, and provide high thermal conductivity across the sample/heat-sink interface.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 91% of the total text.

Use of a Diamond Thin-Film on a Silicon Lens/Heat-Sink

      Disclosed is the concept of using a diamond thin-film on the
bottom surface of a Silicon Lens/Heat-Sink (SLHS).  This thin-film
will extend the life of the lens/heat-sink, improve the optical
coupling between the lens and the sample, and provide high thermal
conductivity across the sample/heat-sink interface.

      The above Figure shows a cross-section of the SLHS structure.
This system is used to image through the backside of an active
integrated circuit.  The SLHS structure is composed of 3 components:
a silicon lens (1); a manifold (2); and a cold-plate (3).  Coolant
flows in through the manifold (2), across the fins in the cold-plate
(3), and back out through return parts (not shown) also in the
manifold (2).  The diamond thin-film (4) will improve the performance
of this structure in three important ways:  First of all, the high
mechanical hardness of the diamond film will prevent occasional dirt
particulates from damaging the bottom surface of the lens (1) or the
heat-sink (2,3).  Secondly, the high refractive index of diamond
(n=2.4) will provide a nearly perfect &lambda./4 antireflection
coating between silicon lens (1) and the imterfacial immersion oil
(6) between the lens and the Silicon IC (5).  Finally, the high
thermal conductivity of the diamond thin-film (4) will efficiently
conduct heat between the IC (5) and the lens(1).  This will generate
thermal refractive index contours withi...