Browse Prior Art Database

Edge Sense with Capacitance Probe

IP.com Disclosure Number: IPCOM000112994D
Original Publication Date: 1994-Jun-01
Included in the Prior Art Database: 2005-Mar-27
Document File: 2 page(s) / 30K

Publishing Venue

IBM

Related People

Jayantha, MS: AUTHOR [+4]

Abstract

This article describes a new method for using a capacitance probe for measuring distance between a target and a probe. Capacitance probe can measure the distance between target and probe. This disclosure shows capacitance probe can be used from perpendicular direction against the target.

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Edge Sense with Capacitance Probe

      This article describes a new method for using a capacitance
probe for measuring distance between a target and a probe.
Capacitance probe can measure the distance between target and probe.
This disclosure shows capacitance probe can be used from
perpendicular direction against the target.

      Capacitance probe is used to measure precise gap distance to
the target from the probe as shown in Fig. 1.  But this method for
measurement has some difficulty, that is, the distance can not be
measured when the probe is positioned at the edge of the target.
This difficulty can be solved by changing the direction of the
capacitance probe as Fig. 2

      In this new method, the direction to be measured is X in Fig.
2.  That is, Capacitance Probe changes the direction by 90 degrees
against the target to be measured.  This method is applied when the
capacitance probe is set at the edge of target.  So, I call this
method " Edge sense with capacitance probe".  This method can show
the same characteristics as current normal method.