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Browse Prior Art Database

Pedestal Mechanism for Silicon Wafer Placement

IP.com Disclosure Number: IPCOM000112998D
Original Publication Date: 1994-Jun-01
Included in the Prior Art Database: 2005-Mar-27
Document File: 2 page(s) / 65K

Publishing Venue

IBM

Related People

Crimi, JA: AUTHOR [+4]

Abstract

Described is a hardware implementation that improves on the method of handling silicon wafers through the use of a pedestal mechanism.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 52% of the total text.

Pedestal Mechanism for Silicon Wafer Placement

      Described is a hardware implementation that improves on the
method of handling silicon wafers through the use of a pedestal
mechanism.

      In prior art, the manipulation of the silicon wafers during
various phases of the fabrication and testing process involved the
use of a mechanism that contained fingers and pins that could subject
the wafer to damage.  The concept described herein substitutes the
use of fingers and pins with a pedestal mechanism which operates in
conjunction with a riston apply tool.  It is designed to eliminate
the possibility of damaging the wafer.  Also, it is designed so that
it is easily modified to handle any unique wafer operational
applications.

      Typically, during the fabrication of silicon wafers, a cassette
is used to transfer the wafers between operational stations.  In
prior art, edge chipping damage was caused by the mechanical
centering fingers.  The fingers were necessary to ensure that the
wafer was centered and positioned correctly within the operational
station.

      The concept described herein replaces the finger mechanism with
a Pedestal Mechanism for Silicon Wafers (PMSW).  The centering
requirement is done by a companion device which detects the wafer
edge as it is rotated and through feed-back iterative processes to a
robot.  Also, the PMSW replaces lifting pins which were required to
lift the wafer above the operational surface in order to provide
space for an automated tool to...