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Start/Stop Process for Magnet Resistive Sensor Deposition

IP.com Disclosure Number: IPCOM000113412D
Original Publication Date: 1994-Aug-01
Included in the Prior Art Database: 2005-Mar-27
Document File: 2 page(s) / 34K

Publishing Venue

IBM

Related People

Christoffer, B: AUTHOR [+4]

Abstract

This article describes a process for reducing the thickness variation when sputtering layers in conventional sputter systems using rotating substrate pallets.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 97% of the total text.

Start/Stop Process for Magnet Resistive Sensor Deposition

      This article describes a process for reducing the thickness
variation when sputtering layers in conventional sputter systems
using rotating substrate pallets.

      The sputter process for MagnetoResistive (MR) Sensor comprises
sputtering three succeeding layers which have to be sputtered within
one single sputter cycle.

      When starting the process, the pallet begins to rotate.  After
a definite time (presputtering) the shutter opens and the coating of
the substrates starts.  Accidentally, the substra that is positioned
under the target when the shutter opens is coated first.  A
synchronisation of coating and target clean is not possible due to
the extremely thin layers and the very short coating times.

      This process leads to high variations on the pallet and to
decreasing yields when special film thicknesses are required.

      Proposed process - For the sputtering procedure a start/stop
process is installed.  The shutter opens during the presputtering
phase.  The plasma now coats the start/stop positions of the
non-operative rotary table (stationary presputtering of definite
positions).  After the presputtering phase the table starts to
rotate.  When the defined sputter time for the respective layer is
over, the table stops exactly at the start/stop positions mentioned
above.

      Using this start/stop process the variation concerning the
various positions can be...