Browse Prior Art Database

Three-Dimensional Photolithography Applications

IP.com Disclosure Number: IPCOM000113438D
Original Publication Date: 1994-Aug-01
Included in the Prior Art Database: 2005-Mar-27
Document File: 4 page(s) / 78K

Publishing Venue

IBM

Related People

Goodman, DS: AUTHOR [+3]

Abstract

Disclosed are applications that utilize three-dimensional substrates and three-dimensional circuitry. This circuitry is fabricated directly on a three-dimensional dielectric substrate using various processes such as contact printing or photolithograpy; additive, semi-additive, or subtractive plating/deposition processes are utilized for forming circuitry. Applications are as follows:

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 100% of the total text.

Three-Dimensional Photolithography Applications

      Disclosed are applications that utilize three-dimensional
substrates and three-dimensional circuitry.  This circuitry is
fabricated directly on a three-dimensional dielectric substrate using
various processes such as contact printing or photolithograpy;
additive, semi-additive, or subtractive plating/deposition processes
are utilized for forming circuitry.  Applications are as follows:

o   A.  Encoders (1) on non-planar or spherical dielectric substrates
    (2), with 3-d electrical circuitry (3) (magnetic materials may
    also be utilized).

o   B.  Stackable chip carriers (4) containing a dielectric substrate
    (5), inner and outer lead bond pads (6) and (7), possibly
    arranged so that substrates are stackable, integrated circuit (8)
    and various forms of locating and retention features (9).

o   C.  Transducers (10), fabricated on nonplanar dielectric
    substrates (11), such as strain gages with metallurgy (12) such
    as constantan or isoelast, temperature sensors, etc.

o   D.  Antenna structures (13), on nonplanar dielectric substrates
    (14) with three-dimensional circuitry (15).

      Lens arrays and structures  designed for specific frequencies
and polarizations are possible.