Dismiss
InnovationQ will be updated on Sunday, Oct. 22, from 10am ET - noon. You may experience brief service interruptions during that time.
Browse Prior Art Database

Locking Pin Design for Double-Sided Brush Clean Tool

IP.com Disclosure Number: IPCOM000113733D
Original Publication Date: 1994-Sep-01
Included in the Prior Art Database: 2005-Mar-27
Document File: 2 page(s) / 52K

Publishing Venue

IBM

Related People

Barry, CG: AUTHOR [+2]

Abstract

A design is described for locking pins that fit into each of five support posts on the turn table assembly used in the dryer station of a double-sided brush clean tool (Fig. 1). The purpose of the locking pins is to keep the wafer in place as the turn table spins the wafer dry at high speed. The locking pin design includes a pivot pin offset and a tapered tail piece. The dimensions are chosen such that the locking pin holds the wafer securely during turn table rotation, but when rotation stops, the locking pin swings open to allow unimpeded access for inserting and removing wafers.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 80% of the total text.

Locking Pin Design for Double-Sided Brush Clean Tool

      A design is described for locking pins that fit into each of
five support posts on the turn table assembly used in the dryer
station of a double-sided brush clean tool (Fig. 1).  The purpose of
the locking pins is to keep the wafer in place as the turn table
spins the wafer dry at high speed.  The locking pin design includes a
pivot pin offset and a tapered tail piece.  The dimensions are chosen
such that the locking pin holds the wafer securely during turn table
rotation, but when rotation stops, the locking pin swings open to
allow unimpeded access for inserting and removing wafers.

      The turn table is shown in Fig. 1 with a wafer in place.  One
of five support posts is shown without the locking pin in place.
Details of the locking pin are shown in Fig. 2.  A shoulder on the
post supports the wafer at the desired height above the turn table as
shown in Fig. 3.  When the turn table is not rotating, the tail of
the locking pin drops down into a groove along one side of the
support post.  The locking pin is free to rotate on the fixed pivot
pin with very little friction.  The pivot pin offset shown in Fig. 2
combined with the taper and length of the locking pin tail assure
that the locking pin attains the maximum open position shown in Fig.
3.  The head of the locking pin will not interfere with insertion or
removal of wafers when the turn table is not rotating.

      The locking pin tail d...