Browse Prior Art Database

Quartz Disk Mask Alignment Fixture

IP.com Disclosure Number: IPCOM000113783D
Original Publication Date: 1994-Oct-01
Included in the Prior Art Database: 2005-Mar-27
Document File: 2 page(s) / 43K

Publishing Venue

IBM

Related People

Chandler, WF: AUTHOR [+3]

Abstract

Disclosed is a quartz disk mask alignment fixture. The fixture allows for the photolithographic patterning of quartz disks using an available ultraviolet (UV) light source.

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Quartz Disk Mask Alignment Fixture

      Disclosed is a quartz disk mask alignment fixture.  The fixture
allows for the photolithographic patterning of quartz disks using an
available ultraviolet (UV) light source.

      The fixture consists of a block of aluminum machined to the
specifications shown in the Figure.  The circular indentations and
the centering pin allow for precise placement of the quartz disk.
The rectangular indentation on the upper edge of the fixture allows
for the placement of the glass mask.  The fixture is coated with
black epoxy to minimize reflectance during the exposure process.

      The first step in the process is to coat the quartz disk with a
photo-sensitive coating.  Once coated, the disk is inserted into the
fixture.  The hole in the center of the disk matches the centering
pin on the fixture.  The glass mask is then inserted over the quartz
disk.  The rectangular groove is physically above the disk so there
is no contact between the disk and the mask.  At this point, any UV
light source can be used to expose the quartz disk.  After the
exposure, the mask is lifted off and the disk removed for further
processing.