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Optical System with Multiple Beams for Excimer Laser Ablation

IP.com Disclosure Number: IPCOM000113799D
Original Publication Date: 1994-Oct-01
Included in the Prior Art Database: 2005-Mar-27
Document File: 2 page(s) / 43K

Publishing Venue

IBM

Related People

Bohlen, H: AUTHOR [+3]

Abstract

Disclosed is an optical system for excimer laser ablation, such as for drilling small via holes into a board, in which a laser beam of high energy is divided into multiple beams and these beams are deflected independently.

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Optical System with Multiple Beams for Excimer Laser Ablation

      Disclosed is an optical system for excimer laser ablation, such
as for drilling small via holes into a board, in which a laser beam
of high energy is divided into multiple beams and these beams are
deflected independently.

Fig. 1 shows an optical system using two beams.

      The laser beam is illuminating the area of two apertures A1, A2
of one mask and passes a prism P11.  Rotating mirrors SX1 and SY1
cause tilting the beam in x- or y-direction.  After passing through
prism P12 and an optical element the image of aperture A1 is
represented in the substrate.

      The images of apertures A1 and A1 may either be congruent or
positioned independently from each other by inclining the mirrors SX1
and SY1.  If only one beam is needed the second beam is deflected to
a stop by one of the mirrors, SX1 or SY1.

      To produce a separate image of each aperture the optical
element may be divided as shown in Fig. 2.

      By adding those parts of the optical system positioned at the
dashed symmetry axis in Fig. 1, e.g., with angles of 90º or
45º, the number of available beams may be increased.

      Allowing several holes to be drilled simultaneously, this
multiple beam system increases product throughput significantly while
being applicable for an optional variety of hole patterns.