Browse Prior Art Database

Moly Mask Electro-Etching Inspection System

IP.com Disclosure Number: IPCOM000113883D
Original Publication Date: 1994-Oct-01
Included in the Prior Art Database: 2005-Mar-27
Document File: 2 page(s) / 39K

Publishing Venue

IBM

Related People

Harper, BM: AUTHOR [+4]

Abstract

Disclosed herein is the design for a system used to inspect and measure etch patterns on product following electro-etch processing and identify undersized patterns requiring additional processing. In the electro-etching process, an acid mixture is funnelled through a positively charged cathode nozzle over the surface of a negatively charged metal mask, on which some areas are protected and other are unprotected. Creation of in-tolerance etch patterns depends on accurate control of exposure time during processing.

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Moly Mask Electro-Etching Inspection System

      Disclosed herein is the design for a system used to inspect and
measure etch patterns on product following electro-etch processing
and identify undersized patterns requiring additional processing.  In
the electro-etching process, an acid mixture is funnelled through a
positively charged cathode nozzle over the surface of a negatively
charged metal mask, on which some areas are protected and other are
unprotected.  Creation of in-tolerance etch patterns depends on
accurate control of exposure time during processing.

      Because of the corrosive environment, a robot handler
manipulates the mask 1 during inspection of five separate
areas--located at the four corners and center of each mask.  A
commercial vision system 2 is used to capture the images of the areas
tested and compare them to a master pattern.  Two of the five test
areas are under the photoresist masking.  With these, an intensified
back lighting mechanism 3 permits accurate measurement of the
silhouettes of those shapes.  Test results for each Device Under Test
(DUT) are stored and used, when appropriate, to determine the
duration of exposure during reprocessing.