Browse Prior Art Database

Use of a Diamond-Like Carbon Thin-Film on a Silicon Lens/Heat Sink

IP.com Disclosure Number: IPCOM000113951D
Original Publication Date: 1994-Oct-01
Included in the Prior Art Database: 2005-Mar-27
Document File: 2 page(s) / 55K

Publishing Venue

IBM

Related People

Cuomo, JJ: AUTHOR [+4]

Abstract

Disclosed is the concept of using a Diamond-Like Carbon (DLC) thin-film on the bottom surface of a Silicon Lens/Heat-Sink (SLHS). This thin film will extend the life of the lens/heat-sink, improve the optical coupling between the lens and the sample, and provide high thermal conductivity across the sample/heat-sink interface.

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Use of a Diamond-Like Carbon Thin-Film on a Silicon Lens/Heat Sink

      Disclosed is the concept of using a Diamond-Like Carbon (DLC)
thin-film on the bottom surface of a Silicon Lens/Heat-Sink (SLHS).
This thin film will extend the life of the lens/heat-sink, improve
the optical coupling between the lens and the sample, and provide
high thermal conductivity across the sample/heat-sink interface.

      The Figure shows a cross section of the SLHS structure, which
is formed of two substructures (a manifold (1) and a cold-plate (2)).
The DLC thin-film (3) is deposited on the bottom surface of the
cold-plate (2).  This coating (3) on the bottom surface of the
cold-plate contacts the sample (4).  If dirt particulates are present
at the interface between the sample and the SLHS, the high mechanical
stiffness of the DLC thin-film (3) will press the dirt into the
substrate of the sample rather than into the bottom of the lens,
thereby extending the life of the SLHS.  Light for imaging (6)
through the back-side of the sample (4) passes through the silicon
lens (5) formed in the top surface of the cold-pate (2), through the
interfacial DLC thin film (3), through the substrate of the sample,
and finally onto devices on the bottom surface of the sample.
Because of the high refractive index of the DLC thin-film (n =
2.1---2.4), light at high incidence angles efficiently couples
through the thin-film by Frustrated Total Internal Reflection (FTIR).
The use of lower refractiv...