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Moly Mask Anode Rotation Mechanism

IP.com Disclosure Number: IPCOM000113991D
Original Publication Date: 1994-Oct-01
Included in the Prior Art Database: 2005-Mar-27
Document File: 2 page(s) / 48K

Publishing Venue

IBM

Related People

Harper, BM: AUTHOR [+4]

Abstract

Disclosed is the design of a mechanism for automating precise incremental rotation of frames holding components of different sizes during processing. A typical implementation is in electro-etching in which an acid mixture is funnelledg through a positively charged cathode nozzle over the surface of a negatively charged metal mask. The mask, transported in a specially designed carrier frame, must be rotated in 90 degree increments during processing to ensure the symmetry of the etching patterns.

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Moly Mask Anode Rotation Mechanism

      Disclosed is the design of a mechanism for automating precise
incremental rotation of frames holding components of different sizes
during processing.  A typical implementation is in electro-etching in
which an acid mixture is funnelledg through a positively charged
cathode nozzle over the surface of a negatively charged metal mask.
The mask, transported in a specially designed carrier frame, must be
rotated in 90 degree increments during processing to ensure the
symmetry of the etching patterns.

      A robot arm starts the process by inserting the anode frame 1
holding the mask into the holding and alignment fixture 2, which is
attached to a large spur gear 3 with its internal diameter cut out to
give the cathode nozzles clearance to apply acid to the mask surface.
The spur gear has a vee-notch track which rides on three large ball
spindles 4, two fixed and one spring-loaded, to permit quick
placement and removal of the entire assembly.  The spur gear is
driven by a programmable motor 5 which interfaces with the tool
controlling system.  The ball spindles are mounted on a specially
designed bracket 6 which supports the whole assembly, all components
of which are made of materials compatible with the acid environment.

      The design for the mask rotation mechanism can be used in any
process where manipulation of components must be fully automated due
to a hazardous processing environment or other process specific
c...