Browse Prior Art Database

Thin Film Type Laminated Head

IP.com Disclosure Number: IPCOM000114287D
Original Publication Date: 1994-Dec-01
Included in the Prior Art Database: 2005-Mar-28
Document File: 4 page(s) / 75K

Publishing Venue

IBM

Related People

Umezaki, H: AUTHOR

Abstract

Disclosed is a magnetic recording head for high track density, high bit density and low noise recording. The head is fabricated by a process combined with thin film head and laminated head.

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Thin Film Type Laminated Head

      Disclosed is a magnetic recording head for high track density,
high bit density and low noise recording.  The head is fabricated by
a process combined with thin film head and laminated head.

      Fig. 1 is an isometric view showing a whole view of the
disclosed head.  The head has an element on a side of the slider and
the element is made of a magnetic core and coils.  A track width is
determined by a thickness of the magnetic core which is made of thin
film.

      Fig. 2 is an isometric view showing a detail of the element.
The coils and the magnetic core are fabricated by thin film process
as shown in Fig. 3.  First the Cu is depositted over the grooves
which are digged in the SiO2 insulator by Reactive Ion Etching (RIE).
Then the surface is lapped to remaine the Cu only in the grooves,
which forms the lower coil.  Next the magnetic core is formed over
the SiO2 insulator which separates the lower coil and the magnetic
core.  A core material is Sendust or FeTaN and is annealed around
400 degrees C after deposition.  Patterning of the core is done by
chemical etching which makes a taper at the edge of the pattern.

      Next the SiO2 is depositted over the core and the via to the
lower coil are digged through it.  Then the upper coil made of Cu is
formed by electro plating.

      After fabrication of the head elements, gap and slider
machining are done by the laminated head process as can be seen in
Fig. 4...